- ultra-low backstreaming
- наднизьке натікання (у вакуумний об’єм)
English-Ukrainian dictionary of microelectronics. 2013.
English-Ukrainian dictionary of microelectronics. 2013.
Vacuum pump — A vacuum pump is a device that removes gas molecules from a sealed volume in order to leave behind a partial vacuum. The vacuum pump was invented in 1650 by Otto von Guericke. Types Pumps can be broadly categorized according to three… … Wikipedia
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